Japan, Jan. 16 -- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTD has got intellectual property rights for 'AIRFLOW CONTROLLING METHOD TO BE USED IN AIR FLOAT CYCLONE OPERATION OF LOW PRESSURE HEAT TREATMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2024-111090
Category (FI): H01L21/316@A,H01L21/31@E,H10P14/60,101@E,H10P14/692@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 10, 2024
Publication Date: Jan. 24, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
