Japan, Feb. 18 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'ALIGNMENT METHOD AND UPDATING METHOD FOR REFERENCE POSITION.' Other related details are as follows:
Application Number: JP,2022-099554
Category (FI): B24B49/12,H10P58/00@C,B23Q17/24@Z,B23Q17/24@C,B24B27/06@M,H01L21/78@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 21, 2022
Publication Date: Jan. 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.