Japan Intellectual Property Rights: AMINOALKOXYDISILAZANE COMPOUND, SILICON-CONTAINING THIN FILM DEPOSITION COMPOSITION CONTAINING THE SAME, AND METHOD FOR PRODUCING SILICON-CONTAINING THIN FILM USING THE SAME

Japan, Jan. 15 -- DNF CO LTD has got intellectual property rights for 'AMINOALKOXYDISILAZANE COMPOUND, SILICON-CONTAINING THIN FILM DEPOSITION COMPOSITION CONTAINING THE SAME, AND METHOD FOR PRODUCING SILICON-CONTAINING THIN FILM USING THE SAME.' Other related details are as follows:

Application Number: JP,2024-209337

Category (FI): C07F7/18@W,H01L21/316@X,H01L21/318@B,H01L21/318@C,H10P14/692@X,H10P14/694@B,H10P14/694@C

Stage: Grant (IP right document published.)

Filing Date: Dec. 2, 2024

Publication Date: June 19, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.