Japan Intellectual Property Rights: ANTENNA FOR INDUCTIVE COUPLING PLASMA EXCITATION, ANTENNA UNIT FOR INDUCTIVE COUPLING PLASMA EXCITATION, AND PLASMA PROCESSING APPARATUS

Japan, May 8 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ANTENNA FOR INDUCTIVE COUPLING PLASMA EXCITATION, ANTENNA UNIT FOR INDUCTIVE COUPLING PLASMA EXCITATION, AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2023-034290

Category (FI): H10P50/20,101@C,H05H1/46@L,H01L21/302,101@C,H01L21/205,H01L21/31@C,H10P14/24,H10P14/60,101@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 7, 2023

Publication Date: Nov. 1, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.