Japan, Feb. 24 -- ASML NETHERLANDS BV has got intellectual property rights for 'APPARATUS AND METHOD FOR MONITORING AND CONTROLLING DROPLET GENERATOR PERFORMANCE.' Other related details are as follows:
Application Number: JP,2024-009368
Category (FI): G03F7/20,521,G03F7/20,501
Stage: PROBLEM TO BE SOLVED: To control droplet generation and coalescence in a manner that allows optimization of these processes.SOLUTION: An apparatus and a method for controlling formation of droplets used to generate EUV radiation comprise a droplet source and an arrangement that produces a laser beam directed to an irradiated region. The droplet source includes a fluid exiting a nozzle, and a sub-system having an electro-actuatable element producing a disturbance in the fluid. The droplet source produces a stream that breaks down into droplets that in turn coalesce into larger droplets as progressing toward the irradiated region. The process is controlled by observing the stream at a point where droplets in the stream have not fully coalesced.SELECTED DRAWING: Figure 9 (Grant)
Filing Date: Jan. 25, 2024
Publication Date: April 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
