Japan, Jan. 21 -- APPLIED MATERIALS INC has got intellectual property rights for 'ARGON ADDITION TO REMOTE PLASMA OXIDATION.' Other related details are as follows:
Application Number: JP,2024-065395
Category (FI): H01L21/316@A,H10P14/60,101@C,H10P14/692@A,H01L21/31@C
Stage: Grant (IP right document published.)
Filing Date: April 15, 2024
Publication Date: Aug. 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
