Japan, Aug. 6 -- MEIDEN NANOPROCESS INNOVATIONS INC has got intellectual property rights for 'ATOMIC LAYER DEPOSITION DEVICE AND ATOMIC LAYER DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2021-135997
Category (FI): C23C16/44@B,C23C16/455,C23C16/40,H01L21/31@B,H01L21/316@X,H10P14/60,101@B,H10P14/692@X
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 24, 2021
Publication Date: June 13, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
