Japan, Jan. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ATTACHMENT METHOD OF PROCESSING TOOL OF PROCESSING DEVICE AND PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2024-060073
Category (FI): B24B45/00@A,B24B7/04@A,B24B49/12,B24B55/06,B23Q3/155@E,B23Q3/155@G,H01L21/304,631,H10P52/00@C,H10P52/00@T
Stage: Grant (IP right document published.)
Filing Date: April 3, 2024
Publication Date: July 12, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.