Japan, March 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'AUTOMATIC PRESSURE CONTROL DEVICE, FILM FORMATION DEVICE AND PRESSURE CONTROL METHOD.' Other related details are as follows:
Application Number: JP,2022-129020
Category (FI): C23C16/44@B,F16K1/22@R,H01L21/31@B,H10P14/60,101@B
Stage: Grant (IP right document published.)
Filing Date: Aug. 12, 2022
Publication Date: Feb. 26, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
