Japan Intellectual Property Rights: CARRIER DEVICE, AND IN-LINE TYPE VACUUM PROCESSING DEVICE WITH THE CARRIER DEVICE

Japan, Oct. 21 -- ULVAC JAPAN LTD has got intellectual property rights for 'CARRIER DEVICE, AND IN-LINE TYPE VACUUM PROCESSING DEVICE WITH THE CARRIER DEVICE.' Other related details are as follows:

Application Number: JP,2022-158963

Category (FI): C23C14/24@J,C23C14/56@G,B65G23/44,B65G15/14,H10P72/30@A,H01L21/68@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 30, 2022

Publication Date: April 11, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.