Japan Intellectual Property Rights: CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING DEVICE, AND PROGRAM

Japan, Jan. 19 -- NUFLARE TECHNOLOGY INC has got intellectual property rights for 'CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING DEVICE, AND PROGRAM.' Other related details are as follows:

Application Number: JP,2022-067706

Category (FI): G03F7/20,504,H01L21/30,541@D,H10P76/00,541@D

Stage: Grant (IP right granted following substantive examination.)

Filing Date: April 15, 2022

Publication Date: Dec. 1, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.