Japan, Nov. 11 -- SUMCO CORP has got intellectual property rights for 'CLUSTER ION BEAM GENERATION METHOD AND CLUSTER ION BEAM IMPLANTATION METHOD.' Other related details are as follows:
Application Number: JP,2022-210754
Category (FI): H01J37/317@Z,H01L21/265@Z,H01J27/20,H01J37/08
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 27, 2022
Publication Date: July 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
