Japan, Oct. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND CONTROL METHOD OF VACUUM VALVE DEVICE.' Other related details are as follows:
Application Number: JP,2022-117477
Category (FI): F16K31/04@A,F16K51/02@A,H01L21/68@A,H10P72/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 22, 2022
Publication Date: Feb. 1, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
