Japan, Jan. 20 -- SUMITOMO HEAVY IND LTD has got intellectual property rights for 'CONTROL DEVICE FOR LASER PROCESSING DEVICE, LASER PROCESSING DEVICE, AND LASER ANNEALING METHOD.' Other related details are as follows:
Application Number: JP,2022-098933
Category (FI): H01L21/265,602@C,H01L21/268@T,H10P34/42@T,H10P34/42@J,H10P30/28@M,H01L21/268@J
Stage: Grant (IP right document published.)
Filing Date: June 20, 2022
Publication Date: Jan. 5, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
