Japan, Aug. 31 -- UNIV EXETER has got intellectual property rights for 'CONTROL OF PROCESSING EQUIPMENT.' Other related details are as follows:
Application Number: JP,2025-146245
Category (FI): H01L21/302,101@G,H01L21/02@Z,H10P50/20,101@G,H10P95/00,102@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 3, 2025
Publication Date: Dec. 9, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.