Japan, Sept. 16 -- DISCO CORP has got intellectual property rights for 'CUTTING DEVICE.' Other related details are as follows:
Application Number: JP,2022-183902
Category (FI): H01L21/78@F,H10P58/00@F
Stage: PROBLEM TO BE SOLVED: To provide a cutting device which prevents an objective lens of imaging means from being contaminated by cutting water and which prevents imaging by the imaging means from being interfered by the cutting water.SOLUTION: Imaging means 9 comprises: a camera 91; a group lens 92 that is connected to the camera 91 and expands the imaging area; a cover lens 93 that covers an objective lens 921 of the group lens 92; a fluid spray nozzle 94 that sprays fluid L1 containing water to the cover lens 93; a fluid removal nozzle 95 that sprays air A1 to the cover lens 93 to remove the fluid L1 adhering to the cover lens 93; and a cutting water removal nozzle 96 that sprays air A2 to a wafer W located directly below the cover lens 93 to remove the cutting water accumulated on the top surface of the wafer W.SELECTED DRAWING: Figure 5 (Grant)
Filing Date: Nov. 17, 2022
Publication Date: May 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
