Japan, Sept. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION APPARATUS AND DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2023-033815
Category (FI): H01L21/31@B,C23C16/455,H01L21/316@X,H10P14/692@X,H10P14/60,101@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 6, 2023
Publication Date: Sept. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
