Japan Intellectual Property Rights: DEPOSITION DEVICE, DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Japan, Aug. 31 -- CANON TOKKI CORP has got intellectual property rights for 'DEPOSITION DEVICE, DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE.' Other related details are as follows:

Application Number: JP,2022-017223

Category (FI): C23C14/50@A,H01L21/68@R,H05B33/10,H05B33/14@A,H10K50/10,H10K50/12,H10K59/00,H10K59/10,H10K59/65,H10K71/00,H10K71/10,H10K71/16,H10K71/16,164,H10K71/16,166,H10P72/72

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 7, 2022

Publication Date: Aug. 18, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.