Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION METHOD AND DEPOSITION DEVICE.' Other related details are as follows:
Application Number: JP,2022-189358
Category (FI): H01L21/31@B,C23C16/455,H01L21/318@B,C23C16/42,H10P14/60,101@B,H10P14/694@B
Stage: Grant (IP right document published.)
Filing Date: Nov. 28, 2022
Publication Date: June 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
