Japan, June 10 -- SHIN ETSU HANDOTAI CO LTD has got intellectual property rights for 'DETECTION METHOD OF MINUTE DEFECT OF SUBSTRATE.' Other related details are as follows:
Application Number: JP,2023-017822
Category (FI): G01N21/956@A,H01L21/66@N,H10P74/20@N
Stage: Grant (IP right document published.)
Filing Date: Feb. 8, 2023
Publication Date: Aug. 21, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
