Japan, Oct. 21 -- APPLIED MATERIALS INC has got intellectual property rights for 'DEVICE AND METHOD FOR CMP TEMPERATURE CONTROL.' Other related details are as follows:
Application Number: JP,2025-019537
Category (FI): B24B37/00@K,B24B37/015,B24B37/12@D,B24B55/00,B24B55/06,H01L21/304,622@R,H10P52/00@U,H10P52/40
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 7, 2025
Publication Date: June 3, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
