Japan, July 14 -- ADTEC ENGINEENG CO LTD has got intellectual property rights for 'DIGITAL EXPOSURE DEVICE.' Other related details are as follows:
Application Number: JP,2022-140418
Category (FI): G03F7/20,505
Stage: PROBLEM TO BE SOLVED: To achieve both high resolution and productivity improvement with respect to a digital exposure device using a spatial light modulator.SOLUTION: A substrate W is moved through an exposure work area E irradiated with light of a pattern formed by first and second spatial light modulators 21, 22. The respective pixels of the first spatial light modulator 21 and the second spatial light modulator 22 are turned ON/OFF with an ON/OFF period as a unit by a modulator control system 8, and the first spatial light modulator 21 and the second spatial light modulator 22 are in a state that periodic lengths of the ON/OFF period are coincided, and phases are displaced. A first irradiation system 31 irradiates the first spatial light modulator 21 with pulse light in which a period of the pulse light is coincided with the ON/OFF period of the first spatial light modulator 21, and a pulse width is half of an ON time zone of the ON/OFF period, and the second irradiation system 32 irradiates the second spatial light modulator 22 with pulse light in which a period of the pulse light is coincided with the ON/OFF period of the second spatial light modulator 22, and a pulse width is half of the ON time zone of the ON/OFF period.SELECTED DRAWING: Figure 3 (Grant)
Filing Date: Sept. 3, 2022
Publication Date: March 14, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
