Japan, June 10 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'DRAWING POSITION INFORMATION ACQUISITION METHOD AND DRAWING METHOD.' Other related details are as follows:
Application Number: JP,2022-151146
Category (FI): H01L21/68@F,H10P72/50@F,G03F9/00@H,G03F7/20,521
Stage: Grant (IP right document published.)
Filing Date: Sept. 22, 2022
Publication Date: April 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.