Japan, Sept. 16 -- APPLIED MATERIALS INC has got intellectual property rights for 'DYNAMIC INTERFACE FOR PROVIDING SYMMETRIC RADIO FREQUENCY RETURN PATH.' Other related details are as follows:
Application Number: JP,2025-129825
Category (FI): H10P95/00,201@Z,H01L21/68@N,H10P72/70,H01L21/02@Z
Stage: PROBLEM TO BE SOLVED: To provide a substrate processing system and processing method to be used for efficiently managing a substrate in a cluster tool environment.SOLUTION: A processing chamber system 700 includes: a liner 715 positioned atop a chamber body 705, the liner including first quick disconnect members 770d; and a substrate support 725 disposed within the chamber body, the substrate support including a support plate 730 including a heater 735. The support plate includes second quick disconnect members 770c. The substrate support includes a shaft 750 coupled with the support plate and a dynamic plate 760 disposed about the shaft. The dynamic plate comprises inner disconnect members 770a and outer quick disconnect members 770b. The inner disconnect members are engageable with the second quick disconnect members at a transfer position; and the outer disconnect members are engageable with the first quick disconnect members at a process position.SELECTED DRAWING: Figure 7A (Grant)
Filing Date: Aug. 4, 2025
Publication Date: Nov. 26, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
