Japan, Aug. 18 -- SAMSUNG ELECTRONICS CO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK DEVICE.' Other related details are as follows:
Application Number: JP,2022-070533
Category (FI): H10P14/60,101@B,H02N13/00@D,H01L21/31@B,H01L21/302,101@G,H01L21/68@R,H10P72/72,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 22, 2022
Publication Date: Nov. 2, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
