Japan, Jan. 20 -- TOTO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK.' Other related details are as follows:
Application Number: JP,2024-029025
Category (FI): H02N13/00@D,H01L21/68@R,H10P72/72
Stage: Grant (IP right document published.)
Filing Date: Feb. 28, 2024
Publication Date: Sept. 9, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
