Japan, Oct. 15 -- TOTO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK.' Other related details are as follows:
Application Number: JP,2024-131678
Category (FI): H10P72/72,H10P50/20,101@G,H10P14/60,101@C,C23C16/458,H01L21/31@C,H01L21/302,101@G,H01L21/68@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 8, 2024
Publication Date: Oct. 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
