Japan, Sept. 9 -- PROTERIAL LTD has got intellectual property rights for 'EPITAXIAL FILM DEPOSITION DEVICE CONTROL SYSTEM.' Other related details are as follows:
Application Number: JP,2025-087903
Category (FI): C30B29/36@A,H10P14/24,H01L21/205,C30B25/20,C23C16/52,C23C14/54@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 27, 2025
Publication Date: Aug. 13, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
