Japan, Sept. 18 -- NHV CORPORATION has got intellectual property rights for 'ESTIMATION DEVICE, LEARNING DEVICE, ESTIMATION METHOD, LEARNING METHOD, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2022-194286
Category (FI): G21K5/04@E,G06N20/00,130,H01J37/147@Z,H01J37/30@A
Stage: PROBLEM TO BE SOLVED: To provide a technique capable of easily adjusting the irradiation distribution on an irradiation surface which is irradiated with an electron beam even when irradiation conditions and device specifications of an electron beam irradiation device are changed.SOLUTION: An estimation device (4) includes: an estimation unit (42) which estimates an adjustment parameter of a scan power source (2) using a learned model that learns the combination of the irradiation distribution on the irradiation surface which is irradiated with a scanned electron beam, the device specifications indicating the specifications of an electron beam irradiation device (1), and an adjustment parameter of the scan power source (2) as teacher data; and a scan power source control unit (41) which sets the estimated adjustment parameter to the electron beam irradiation device (1).SELECTED DRAWING: Figure 10 (Grant)
Filing Date: Dec. 5, 2022
Publication Date: June 17, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
