Japan, Oct. 30 -- HITACHI HIGH-TECH CORP has got intellectual property rights for 'ETCHING METHOD AND ETCHING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-154748
Category (FI): H01L21/302,105@A
Stage: Grant (IP right document published.)
Filing Date: Sept. 9, 2024
Publication Date: April 9
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
