Japan, Jan. 19 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND ETCHING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-099662
Category (FI): H01L21/302,201@A,H10P50/20,201@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 15, 2021
Publication Date: Dec. 27, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
