Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND ETCHING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-056011
Category (FI): H10P50/20,104,H01L21/302,201@A,H01L21/302,104@Z,H10P50/24,H10P50/20,201@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 30, 2023
Publication Date: Oct. 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
