Japan Intellectual Property Rights: ETCHING METHOD AND ETCHING DEVICE

Japan, March 25 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND ETCHING DEVICE.' Other related details are as follows:

Application Number: JP,2022-149934

Category (FI): C23F1/00,101,C23F1/12,H01L21/302,105@A,H10P50/20,100,H10P50/20,105@A,H10P50/26,H10P50/66

Stage: Grant (IP right document published.)

Filing Date: Sept. 21, 2022

Publication Date: April 2, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.