Japan, Oct. 15 -- NIKON CORP has got intellectual property rights for 'EXPOSURE APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE.' Other related details are as follows:
Application Number: JP,2025-159742
Category (FI): G03F7/20,505,G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 26, 2025
Publication Date: Jan. 14
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
