Japan, March 3 -- CANON INC has got intellectual property rights for 'EXPOSURE METHOD, EXPOSURE APPARATUS, MEASUREMENT METHOD, PROGRAM, AND ARTICLE PRODUCTION METHOD.' Other related details are as follows:
Application Number: JP,2022-065858
Category (FI): G03F9/02@H
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 12, 2022
Publication Date: Oct. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
