Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION APPARATUS AND METHOD FOR CLEANING THE SAME.' Other related details are as follows:
Application Number: JP,2021-108131
Category (FI): C23C14/34@G,G01B7/00,101@M
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 29, 2021
Publication Date: Jan. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
