Japan, Nov. 17 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION APPARATUS AND METHOD FOR DEPOSITING FILM.' Other related details are as follows:
Application Number: JP,2022-163116
Category (FI): C23C14/34@G,C23C14/34@U
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 11, 2022
Publication Date: April 23, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
