Japan, Nov. 17 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2021-161602
Category (FI): H01L21/68@A,H01L21/68@U,C23C14/34@V,C23C14/56@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 30, 2021
Publication Date: April 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
