Japan, Sept. 18 -- CANON TOKKI CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2024-192102
Category (FI): H10K71/16,H10K71/10,H10K71/00,H10K59/00,H10K59/10,H10K71/16,166,C23C14/24@G,C23C14/24@J
Stage: PROBLEM TO BE SOLVED: To provide a film deposition apparatus capable of improving film deposition accuracy.SOLUTION: A film deposition apparatus includes a magnet plate 11 provided inside a chamber, and generating magnetic force for attracting a mask to an adsorption plate, a plate unit lifting and lowering unit for lifting and lowering the magnet plate 11, and a connection mechanism 1100 for connecting the magnet plate 11 to the plate unit lifting and lowering unit so that the magnet plate 11 performs at least either of rotation and vertical movement according to external force working on the magnet plate 11.SELECTED DRAWING: Figure 8 (Grant)
Filing Date: Oct. 31, 2024
Publication Date: Feb. 4, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
