Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2021-094461
Category (FI): H10P14/43,C23C16/455,H01L21/285,301,H01L21/285@C,C23C16/08,C23C16/02
Stage: Grant (IP right document published.)
Filing Date: June 4, 2021
Publication Date: Dec. 15, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
