Japan, Jan. 16 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-096878
Category (FI): C23C14/08@K,C23C14/34@K,H01L21/203@S,H10P14/22
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 9, 2021
Publication Date: Dec. 21, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
