Japan, Oct. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION TREATMENT SYSTEM AND CONTROL METHOD FOR FILM DEPOSITION TREATMENT SYSTEM.' Other related details are as follows:
Application Number: JP,2024-090764
Category (FI): C23C16/02,C23C14/54@D,C23C14/02@B,C23C16/52
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 4, 2024
Publication Date: Dec. 16, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
