Japan, March 3 -- CANON INC has got intellectual property rights for 'FILM FORMING APPARATUS, FILM FORMING METHOD, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2024-068027
Category (FI): H10P76/00,578,H01L21/30,502@D,H01L21/30,578,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 19, 2024
Publication Date: Oct. 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
