Japan, April 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM FORMING METHOD AND FILM FORMING APPARATUS.' Other related details are as follows:
Application Number: JP,2025-105780
Category (FI): H10P14/46,101,C23C16/04,H01L21/288@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 23, 2025
Publication Date: Aug. 22, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
