Japan, July 14 -- APPLIED MATERIALS INC has got intellectual property rights for 'FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT.' Other related details are as follows:
Application Number: JP,2022-005423
Category (FI): G03F7/20,521,H10P72/70,H01L21/68@N
Stage: PROBLEM TO BE SOLVED: To provide electronic device fabrication, and more specifically, flat head units for heavy load alignment.SOLUTION: A mask frame support unit includes a case, a protruding body extending below the case, and a station having a flat head disposed above the case. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case, and includes a second end having a second diameter opposite the first end. The second diameter is less than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The case houses a number of components including an upper receiving plate in contact with the station, a lower receiving plate disposed underneath the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and a centering component.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: Jan. 18, 2022
Publication Date: Aug. 2, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
