Japan, Jan. 15 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'FLUID CABINET EXHAUST CONTROL METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-038667
Category (FI): H01L21/304,648@Z,H10P70/00,108@Z
Stage: Grant (IP right document published.)
Filing Date: March 11, 2022
Publication Date: Oct. 7, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
