Japan Intellectual Property Rights: FOREIGN MATTER REMOVAL METHOD, FORMING METHOD, MANUFACTURING METHOD FOR AN ARTICLE, FOREIGN MATTER REMOVAL DEVICE, AND SYSTEM

Japan, March 24 -- CANON INC has got intellectual property rights for 'FOREIGN MATTER REMOVAL METHOD, FORMING METHOD, MANUFACTURING METHOD FOR AN ARTICLE, FOREIGN MATTER REMOVAL DEVICE, AND SYSTEM.' Other related details are as follows:

Application Number: JP,2022-073676

Category (FI): H01L21/30,502@D,H10P76/00,600,B29C59/02@Z,H10P76/00,564@Z,H10P70/00,201@Z,H10P70/00,103@Z,H10P70/00,201,H10P70/00,108@G,H01L21/304,643,H01L21/304,648@G,H01L21/304,651,H10P70/00,103,H01L21/30,564@Z

Stage: Grant (IP right document published.)

Filing Date: April 27, 2022

Publication Date: Nov. 9, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.