Japan, Sept. 30 -- HPSP CO LTD has got intellectual property rights for 'GAS MANAGEMENT ASSEMBLY FOR SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2025-064599
Category (FI): H10P14/60,101@B,H01L21/31@B,H01L21/02@Z,H10P95/00,201@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 9, 2025
Publication Date: Oct. 23, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
