Japan, Jan. 15 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'GAS SUPPLY BODY, PROCESSING EQUIPMENT, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE.' Other related details are as follows:
Application Number: JP,2022-155532
Category (FI): C23C16/455,H01L21/31@B,H10P14/60,101@B
Stage: Grant (IP right document published.)
Filing Date: Sept. 28, 2022
Publication Date: April 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
