Japan, Sept. 16 -- DISCO CORP has got intellectual property rights for 'GRINDING METHOD OF WORKPIECE.' Other related details are as follows:
Application Number: JP,2022-185547
Category (FI): B24B1/00@F,B24B19/02,H10P52/00@Q,H10P52/00@C,B24B7/04@A,H01L21/304,631
Stage: PROBLEM TO BE SOLVED: To reduce deterioration in the condition of a second grinding stone.SOLUTION: A grinding method of workpiece includes a first grinding step of grinding workpiece by a first grinding wheel having a plurality of first grinding stones, and a second grinding step of grinding the workpiece by a second grinding wheel having a plurality of second grinding stones having abrasive grains having the average particle diameter smaller than the average particle diameter of abrasive grains of the respective first grinding stones, wherein the first grinding step includes an upper face side grinding step of grinding the upper face side of the workpiece in a state in which the first grinding wheel and a first chuck table are rotated, and a groove formation step of grinding the workpiece in a state in which the first grinding wheel is rotated and the first chuck table is not rotated, and forming a first arc-shaped groove having a first depth and a second arc-shaped groove having a second depth different from the first depth in the workpiece, and the second grinding step grinds the workpiece by the second grinding wheel so as to remove the first groove and the second groove.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: Nov. 21, 2022
Publication Date: May 31, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
